Transfer chuck

Moves the chuck of a probe station to a work position or to a load position.

Description

The test moves the chuck to the selected position. Depending on the position, the probe station executes one of the following remote commands:

Chuck position	Movement	SENTIO remote command
Off-axis camera	Moves the chuck to the off-axis camera site.	move_chuck_work_area O
Scope camera	Moves the chuck to the probing camera site below the scope.	move_chuck_work_area P
Front load	Moves the chuck to the load position at the front door.	move_chuck_load F
Side load	Moves the chuck to the load position at the side door.	move_chuck_load S
Center	Moves the chuck from a load position back to the probing center.	move_chuck_load C

The camera sites "Off-axis camera" and "Scope camera" are only available on probe stations with more than one camera site. "Side load" is only available on probe stations with a side door.

Input parameters

The test requires to select a probe station, added in the device manager.

Parameter	Description
Chuck position	Target position of the chuck (Off-axis camera, Scope camera, Front load, Side load or Center).

Output parameters

The test does not provide output parameters.

Supported devices

The following devices are supported by this test:

• MPI SENTIO Software Suite

Example

Hardware setup:

Connect a wafer prober to the computer running Measmatic over TCP/IP, GPIB or RS232.

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Wafer prober)

In the device manager add the wafer prober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.

Usage:

To inspect the wafer with the off-axis camera, add the test with the chuck position "Off-axis camera" to the test sequence. Add a second test with the chuck position "Scope camera" to move the chuck back below the scope before probing.