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Scope go to focus#

System will execute Go-To-Focus function.

Description#

The test will execute the Go-To-Focus function of the probe station. The motorized scope stage will move to a calculated height based on the wafer thickness defined in the wafermap. If no autofocus has been performed, the system will automatically run this function after reaching the calculated height. If autofocus has already been successfully performed, Sentio will only move to the updated height and will not perform autofocus again.

Input parameters#

The test requires to select a probe station, added in the device manager.

Output parameters#

The test does not provide output parameters.

Supported devices#

The following devices are supported by this test:

  • MPI SENTIO Software Suite

Example#

Hardware setup:

Connect a wafer prober to the computer running Measmatic over TCP/IP, GPIB or RS232. 

flowchart LR
    A(Measmatic) o---o |TCP/IP, 
    GPIB or 
    RS232| B(Wafer prober)

In the device manager add the wafer prober to the current test site configuration. Change the name, the IP address in the device properties of the device. If needed, increase the communication timeout for the probe station device.