Scope lift#
Moves the scope z axis to the lift or unlift position.
Description#
The test moves the motorized scope of the connected probe station to its lift position (scope raised, e.g. for wafer loading or manual access) or back to the unlift position. An optional additional z offset can be applied to the target position.
Input parameters#
| Parameter | Description |
|---|---|
| Probe station | The probe station whose scope shall be moved. |
| Position | "Lift" raises the scope to the lift position, "Unlift" moves it back to the unlift position. |
| z offset | An optional additional offset on the z axis. 0 applies no offset. |
Output parameters#
This test does not store output parameters.
Supported devices#
All probe stations with a motorized scope z axis, e.g. MPI SENTIO based probe
stations (SENTIO 3.7.1 or later, remote command move_scope_lift).
Example#
Select the probe station and choose "Lift" to raise the scope before loading a wafer; run the test again with "Unlift" to return the scope to its working height.